SPTS Technologies is a manufacturer of plasma etch and deposition and thermal processing equipment for the semiconductor industry. The company offers advanced process technologies such as inductively coupled plasma (ICP) etching of silicon, dielectrics, polymers and metals; deep reactive ion etching (DRIE) of silicon; dry release etch using HF or XeF2; plasma enhanced chemical vapor deposition (PECVD); physical vapor deposition (PVD); ion beam deposition; metal-organic chemical vapor deposition (MOCVD); atmospheric pressure chemical vapor deposition (APCVD); and diffusion and LPCVD furnaces. SPTS also supplies etch, deposition and thermal technologies to semiconductor manufacturers and universities/research institutes. The technologies offered are plasma etch, release etch , PECVD, metal deposition, APCVD, processing. The etch/deposition platforms are fxP, i2L and LPX.